Nano Stepper Actuator for UHV
A truly UHV compatible high force linear actuator with nanometer resolution and absolute position feedback. For non-cryogenic operation only.

Product description
The Nano Stepper Actuator (NSAU) is a completely sealed linear actuator developed for highly accurate positioning in Ultra High Vacuum (UHV) or Ultra Clean Environments. A stepper motor combined with a high-quality reduction and ball screw offers backlash free nanometer positioning resolution and high load capacity. Electrical limit switches and motor temperature sensing are integrated, and the encoder offers high resolution position feedback and absolute position information, even after a power-off/on cycle. All electrical signals are available via a single circular connector.
Key features
- UHV compatible (sealed by laser welding)
- Nanometer resolution
- Absolute position feedback (no homing needed)
- All stainless steel construction
- Vacuum compatible mating connector available
- Push-pull load capacity
- Self-locking (set-and-forget)
- Suited for harsh environments (dust)
- Compatible with many motion controllers
- Contamination free (no particle generation)
Model datasheets
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