Vacuum Linear Stages
Vacuum compatible high-precision motion stages that offer nanometric repeatability. For non-cryogenic operation only.
Product description
The Vacuum Linear Stage (VLS) is a long stroke linear stage with a 350 mm stroke in a compact robust package. The implementation of a compliant carriage in combination with a defined pretension offers numerous benefits such as consistent high repeatability throughout its lifetime, minimized drive friction and high resolution. The VLS is equipped with a direct drive motor and encoder feedback to reach the desired position with high accuracy in vacuum environments.
Key features
- 350 mm stroke
- High vacuum compatible
- Consistent high repeatability throughout its lifetime (no play)
- Minimum dissipation
- Integrated end stops
- Optional absolute encoder
Model datasheets
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